Effect of Post Annealing on Electrical Properties of (Ni/Au)/Al0.20Ga0.80N Schottky Contacts
 
Yazarlar (2)
Doç. Dr. Abdullah AKKAYA Kırşehir Ahi Evran Üniversitesi, Türkiye
Enise Ayyildiz Erciyes Üniversitesi, Türkiye
Makale Türü Özgün Makale (SCOPUS dergilerinde yayınlanan tam makale)
Dergi Adı MATERIALS TODAY-PROCEEDINGS
Dergi ISSN 2214-7853
Dergi Tarandığı Indeksler Scopus, Conference Proceedings Citation Index, INSPEC
Makale Dili Türkçe Basım Tarihi 01-2016
Kabul Tarihi Yayınlanma Tarihi 01-01-2016
Cilt / Sayı / Sayfa 3 / 5 / 1248–1254 DOI 10.1016/j.matpr.2016.03.067
Makale Linki https://linkinghub.elsevier.com/retrieve/pii/S2214785316002790
Özet
The effects of thermal annealing on the electrical properties of Ni/Au Schottky contacts on n-type AlxGa1-xN (x=0.20) were investigated by current-voltage (I-V) and capacitance-voltage (C-V) measurements. The Schottky barrier height (SBH) of as-deposited contacts was found to be 0.946±0.033 eV (from I-V) and 1.120±0.047 eV (from C-V) with an ideality factor of 1.655±0.137. The values of SBH obtained from the C-V measurements were found to be higher than that of obtained from the I-V measurements. This was attributed to the presence of the lateral inhomogeneities of the barrier height. The values of SBH slightly increased after the annealing temperatures at 300, 400 and 500 °C. The highest value of SBH for Ni/Au Schottky contact was obtained after annealing at 600 °C and the value was 1.521±0.032 eV. The good performance of the annealed Ni/Au contact can be attributed to reaction of Ni with the GaN …
Anahtar Kelimeler
Schottky barrier height | AlGaN | Electrical properties | Barrier inhomogeneity | Thermal annealing